Semiconductor light-emitting device

ABSTRACT

A first cladding layer of a first conductivity type formed above a crystal substrate, an active layer formed above the first cladding layer, a diffusion prevention layer formed on the active layer and preventing an impurity from diffusing into the active layer, an overflow prevention layer of a second conductivity type, the second conductivity type being different from the first conductivity type, which is formed on the diffusion prevention layer and prevents an overflow of carriers implanted into the active layer, and a second cladding layer of the second conductivity type formed above the overflow prevention layer are provided.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. Ser. No. 11/061,735, filedFeb. 22, 2005, whose contents are expressly incorporated herein byreference. This application is also based upon and claims the benefit ofpriority from prior Japanese Patent Application No. 2004-111260, filedon Apr. 5, 2004, in Japan, the entire contents of which are incorporatedherein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to semiconductor light-emitting devices.

2. Background Art

Semiconductor light-emitting devices emitting blue-violet laser beamshaving a wavelength in the 400 nm band have been developed for use innext-generation DVDs (digital versatile disks) etc. A ridge waveguidesemiconductor light-emitting device is known as an example of suchdevices, with a device structure having, e.g., a double heterojunctionon a GaN substrate, the double heterojunction being formed of a materialcontaining a InGaAlN, and having an upper cladding layer in a shape of aridge (for example, Japanese Patent Laid-Open Publication No.2000-299497). In this ridge waveguide semiconductor light-emittingdevice, a non-doped n-type contact layer is formed ofAl_(0.05)Ga_(0.95)N on an n-type GaN substrate. An n-type contact layeris formed of Si-doped Al_(0.05)Ga_(0.95)N on the non-doped n-typecontact layer. An n-side electrode is formed in a region of the n-typecontact layer, and a Si-doped n-type crack prevention layer is formed ofIn_(0.08)Ga_(0.92)N in the remaining region. A multilayer film having asuperlattice structure serving as an n-type cladding layer is formed onthe n-type crack prevention layer by alternately stacking non-dopedAl_(0.14)Ga_(0.86)N layers and Si-doped GaN layers 160 times. Anon-doped n-type guide layer is formed of GaN on the n-type claddinglayer. An active layer having a multiple quantum well (MQW) structure isformed on the n-type guide layer by alternately stacking Si-dopedIn_(0.01)Ga_(0.99)N barrier layers and undoped In_(0.11)Ga_(0.89)N welllayers three times and forming a barrier layer thereon. An Mg-dopedp-type overflow prevention layer is formed of Al_(0.4)Ga_(0.6)N on theactive layer. A multilayer film having a superlattice structure servingas a p-type cladding layer is formed in a ridge shape on the p-typeoverflow prevention layer by alternately stacking non-dopedAl_(0.1)Ga_(0.9)N layers and Mg-doped GaN layers 100 times. A protectionlayer is formed of a Zr oxide at a side portion of the p-type claddinglayer, and an Mg-doped p-type contact layer is formed of GaN on thep-type cladding layer. A p-side electrode is formed on the p-typecladding layer and the protection layer.

Since the band gap of the overflow prevention layer is wide, it ispossible to shield electrons implanted from the n-side electrode, and toconfine the electrons in the active layer. In order to improve theoverflow prevention effect, however, it is necessary to increase theimpurity concentration of the overflow prevention layer so as to furtherwiden the band gap. In such a case, there is a problem in that theimpurity is diffused into the active layer, thereby inhibitingluminescent recombination and decreasing luminous efficiency.

SUMMARY OF THE INVENTION

A semiconductor light-emitting device according to an aspect of thepresent invention includes:

a first cladding layer of a first conductivity type formed above acrystal substrate;

an active layer formed above the first cladding layer;

a diffusion prevention layer formed on the active layer and preventingan impurity from diffusing into the active layer;

an overflow prevention layer of a second conductivity type, the secondconductivity type being different from the first conductivity type,which is formed on the diffusion prevention layer and prevents anoverflow of carriers implanted into the active layer; and

a second cladding layer of the second conductivity type formed above theoverflow prevention layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view showing the structure of a semiconductorlight-emitting device according to a first embodiment of the presentinvention.

FIG. 2 is a characteristic graph obtained through a simulation of I-Lcharacteristics of the semiconductor light-emitting device of the firstembodiment and semiconductor light-emitting devices according tocomparative examples 1 and 2 when the atmosphere is at a roomtemperature.

FIG. 3 is a graph obtained through a simulation of I-L characteristicsof the semiconductor light-emitting device of the first embodiment andthe semiconductor light-emitting devices according to the comparativeexamples 1 and 2 when the atmosphere is at 100° C.

FIG. 4 is a sectional view showing the structure of a semiconductorlight-emitting device according to a second embodiment of the presentinvention.

FIG. 5 is a sectional view showing the structure of semiconductorlight-emitting devices according to the comparative examples 1 and 2.

DESCRIPTION OF THE EMBODIMENTS

Hereinafter, embodiments of the present invention will be described withreference to the accompanying drawings.

(First Embodiment)

FIG. 1 shows the structure of a semiconductor light-emitting deviceaccording to a first embodiment of the present invention.

An n-type cladding layer 2 having a thickness of 0.5 μm or more and 2.0μm or less is formed of Al_(0.08)Ga_(0.92)N on an n-type substrate 1 ofGaN. An n-type optical guide layer 3 having a thickness of 0.01 μm ormore and 0.1 μm or less is formed of GaN on the n-type cladding layer 2.On the n-type optical guide layer 3, an active layer 4 having a multiplequantum well (MQW) structure is formed by alternately stacking, two tofour times, barrier layers each having a thickness of 3 nm or more and10 nm or less and being formed of Si-doped In_(0.02)Ga_(0.98)N, and welllayers each having a thickness of 2 nm or more and 5 nm or less andbeing formed of non-doped In_(0.15)Ga_(0.85)N, and forming thereon abarrier layer having a thickness of 3 nm or more and 10 nm or less andbeing formed of Si-doped In_(0.02)Ga_(0.98)N. A diffusion preventionlayer 51 having a thickness of 0.02 μm or more and 0.1 μm or less isformed of non-doped GaN on the active layer 4. A p⁺-type overflowprevention layer 5 having a thickness of 5 nm or more and 20 nm or lessis formed of Al_(0.2)Ga_(0.8)N on the diffusion prevention layer 51. Ifthe diffusion prevention layer 51 were too thin, the impurity of thep⁺-type overflow prevention layer 5 would be diffused into the activelayer 4, and if the diffusion prevention layer 51 were too thick, theoverflow prevention layer 5 would become too distant from the activelayer 4, thereby losing the overflow prevention effect.

A p-type optical guide layer 6 having a thickness of 0.01 μm or more and0.1 μm or less is formed of GaN on the overflow prevention layer 5. Ap-type cladding layer 7 having a thickness of 0.5 μm or more and 2.0 μmor less is formed of Al_(0.08)Ga_(0.92)N on the optical guide layer 6. Ap⁺-type contact layer 8 having a thickness of 0.02 μm or more and 0.2 μmor less is formed of GaN on the cladding layer 7. The contact layer 8and the cladding layer 7 are formed to have a ridge shape, theridge-shaped portion of the cladding layer 7 and the contact layer 8serving as a ridge waveguide 10. The ridge waveguide 10 extends in adirection perpendicular to the paper surface of the drawing. That is tosay, the ridge waveguide 10 forms a stripe pattern when viewedperpendicularly from above the paper surface.

A protection layer 9 having a thickness of 0.2 μm or more and 0.7 μm orless is formed of SiO₂ on the entire surface of the workpiece except forthe portion directly above the ridge waveguide 10, a p-side electrode 11is formed on the ridge waveguide 10, and an n-side electrode 12 isformed below the GaN substrate 1. The p-side electrode 11 can be formedof a layer containing at least one metal selected from Pt, Pd, Ni, Au,etc., a laminated layer formed by stacking two or more metals selectedfrom the aforementioned metals, or a layer containing an alloy of theaforementioned metals. The n-side electrode 12 can be formed of a layercontaining at least one metal selected from Ti, Pt, Au, Al, etc. alaminated layer formed by stacking two or more metals selected from theaforementioned metals, or a layer containing an alloy of theaforementioned metals. The cladding layers 2 and 7 can be superlatticelayers each being formed by alternately growing Al_(0.16)Ga_(0.84)Nlayers and GaN layers each having a thickness of 1 nm or more and 5 nmor less. It is preferable that the temperature at which the overflowprevention layer 5 and the diffusion prevention layer 51 are formed behigher than the temperature at which the active layer 4 is formed.

A semiconductor light-emitting device, in which the diffusion preventionlayer 51 is not formed and the impurity is not diffused into the activelayer 4 in the semiconductor light-emitting device of this embodiment,is prepared as a comparative example 1, and a semiconductorlight-emitting device, in which the diffusion prevention layer 51 is notformed and the impurity is diffused into the active layer 4, is preparedas a comparative example 2. The comparative examples 1 and 2 have astructure shown in FIG. 5.

FIG. 2 shows a simulation of the characteristics of a light outputrelative to an applied current (I-L characteristics) in thesemiconductor light-emitting device of the first embodiment andsemiconductor light-emitting devices according to comparative examples 1and 2, when the atmosphere is at a room temperature. FIG. 3 shows asimulation when the atmosphere is at 100° C.

It is understood that in the case of the comparative example 2 in whichan impurity is diffused into the active layer 4, the threshold currentincreases as compared to this embodiment and the comparative example 1,the efficiency (the gradient of the I-L characteristic line) isdecreased, and the saturation of I-L characteristics at a hightemperature becomes remarkable. The reason for this is an increase innon-luminescent recombination caused by displacement of p-n junction orformation of energy level due to impurity diffusion.

In contrast, in this embodiment, the threshold current is decreased andthe efficiency is increased as compared with the comparative examples 1and 2, so that no saturation of the I-L characteristics is found. Thismeans that the characteristics are improved as compared with the case ofcomparative example 1 where there is no impurity diffusion in the activelayer. The reason for this may be the existence of the diffusionprevention layer 51 between the active layer 4 and the overflowprevention layer 5, with which the overflow prevention layer 5 having alower refractive index becomes a little more distant from the activelayer 4, thereby increasing the degree of light confined in the activelayer 4.

As described above, according to this embodiment, it is possible to curbimpurity diffusion from an overflow layer to an active layer, therebycurbing a decrease in luminous efficiency.

It is preferable that the n-type cladding layer 2 and the p-typecladding layer 7 are superlattice layers formed of Al_(s)Ga_(1-s)N orAl_(s)Ga_(1-s)N/GaN (0.0<s≦0.3).

Furthermore, it is preferable that active layer 4 is a multiple quantumwell active layer formed of In_(x)Ga_(1-x)N/In_(y)Ga_(1-y)N (0.05≦x≦1.0,0≦y≦1.0, x>y).

Moreover, it is preferable that the overflow prevention layer 5 isformed of Al_(t)Ga_(1-t)N with the stoichiometric ratio t of Al beinggreater than the stoichiometric ratio s of Al in the cladding layers 2and 7.

Further, it is preferable that the diffusion prevention layer 51 isformed of Al_(u)Ga_(1-u)N(0≦u<t), the stoichiometric ratio u of Al inthe diffusion prevention layer 51 being 0 or more, and smaller than thestoichiometric ratio t of Al in the overflow prevention layer 5. Withsuch a structure, the refractive index becomes greater, therebyincreasing the degree of light confined in the active layer.

In addition, it is preferable that the impurity concentration of theoverflow prevention layer 5 is 5×10¹⁸/cm⁻³ or more, and the diffusionprevention layer is a non-doped layer. With such a structure, it ispossible to curb overflow of carriers from the active layer further.

Furthermore, it is desirable that the ridge width of the ridge waveguide10 is 1.5 μm or more and 2.5 μm or less. When the ridge width is lessthan 1.5 μm, the resistance value increases, thereby increasing theoperating voltage. When the ridge width is more than 2.5 μm, ahigh-order mode oscillation is likely to begin. Moreover, it isdesirable that the thickness of the second cladding layer 7 except forthe portion of the ridge waveguide 10 is 0.03 μm or more and 0.2 μm orless. When the thickness of the second cladding layer 7 except for theportion of the ridge waveguide 10 is less than 0.03 μm, the differencein refractive index between the ridge portion and the. other portionsbecomes great, thereby easily causing a high-order mode oscillation.When the thickness is more than 0.20 μm, the current spreads in ahorizontal direction, thereby increasing the reactive current.

(Second Embodiment)

FIG. 4 shows the structure of a semiconductor light-emitting deviceaccording to a second embodiment of the present invention.

The semiconductor light-emitting device according to this embodiment hasa structure in which the diffusion prevention layer 51 of non-doped GaNis designed to be thicker than that of the first embodiment shown inFIG. 1, e.g., 0.1 μm to 0.15 μm, and to have an optical guide function,and the p-type optical guide layer 6 of GaN is removed. Generally, thecloser the overflow prevention layer 5 is to the active layer 4, thegreater the effect. However, even if the active layer 4 and the overflowprevention layer are a little more distant from each other, it ispossible to keep the overflow prevention effect by increasing theimpurity concentration to improve the barrier effect. Accordingly, inthis embodiment, the impurity concentration of the overflow preventionlayer 5 is designed to be higher than that of the first embodiment.

Like the first embodiment, in this embodiment, it is possible to curbthe impurity diffusion from the overflow layer to the active layer,thereby curbing the degradation of luminous efficiency.

As described above, according to the embodiments of the presentinvention, it is possible to curb the impurity diffusion from theoverflow layer to the active layer, thereby curbing the degradation ofluminous efficiency.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcepts as defined by the appended claims and their equivalents.

1. A semiconductor light-emitting device comprising: a first claddinglayer of a first conductivity type; an active layer formed above thefirst cladding layer; a layer formed on the active layer; an overflowprevention layer of a second conductivity type, the second conductivitytype being different from the first conductivity type, which is formedon the layer, the overflow prevention layer having greaterstoichiometric ratio of Al than the layer; and a second cladding layerof the second conductivity type formed above the overflow preventionlayer.
 2. A semiconductor light-emitting device of claim 1, wherein theactive layer has a barrier layer provided being in adjacent to thelayer.
 3. A semiconductor light-emitting device of claim 1, wherein athickness of the layer is 0.02 μm or more and 0.15 μm or less.
 4. Asemiconductor light-emitting device of claim 1, wherein an impurityconcentration of the overflow prevention layer is 5×10¹⁸/cm⁻³ or more,and the layer is a non-doped layer.
 5. A semiconductor light-emittingdevice according to claim 1, wherein the overflow prevention layer isformed of Al_(t)Ga_(1-t)N (t>0.16).
 6. A semiconductor light-emittingdevice of claim 2, wherein an impurity concentration of the overflowprevention layer is 5×10¹⁸/cm⁻³ or more, and the layer is a non-dopedlayer.
 7. A semiconductor light-emitting device comprising: a firstcladding layer of a first conductivity type; an active layer formedabove the first cladding layer, the active layer having a multiplequantum well structure formed of In_(x)Ga_(1-x)N/In_(y)Ga_(1-y)N(0.05≦x≦1.0, 0≦y≦1.0, x>y); a layer formed on the active layer; anoverflow prevention layer of a second conductivity type, the secondconductivity type being different from the first conductivity type,which is formed on the layer, the overflow prevention layer havinggreater stoichiometric ratio of Al than the layer; and a second claddinglayer of the second conductivity type formed above the overflowprevention layer.
 9. A semiconductor light-emitting device of claim 7,wherein the active layer has a barrier layer provided being in adjacentto the layer.
 10. A semiconductor light-emitting device of claim 9,wherein an impurity concentration of the overflow prevention layer is5×10¹⁸/cm⁻³ or more, and the layer is a non-doped layer.
 11. Asemiconductor light-emitting device comprising: a first cladding layerof a first conductivity type; an active layer formed above the firstcladding layer; a GaN layer formed on the active layer; an overflowprevention layer of a second conductivity type, the second conductivitytype being different from the first conductivity type, which is formedon the diffusion prevention layer; and a second cladding layer of thesecond conductivity type formed above the overflow prevention layer. 12.A semiconductor light-emitting device of claim 11, wherein the GaN layeris non-doped GaN.
 13. A semiconductor light-emitting device of claim 11,wherein the active layer has a barrier layer provided being in adjacentto the layer.
 14. A semiconductor light-emitting device of claim 11,wherein a thickness of the layer is 0.02 μm or more and 0.15 μm or less.15. A semiconductor light-emitting device of claim 11, wherein animpurity concentration of the overflow prevention layer is 5×10¹⁸/cm⁻³or more, and the layer is a non-doped layer.
 16. A semiconductorlight-emitting device of claim 11, wherein the active layer has amultiple quantum well structure formed ofIn_(x)Ga_(1-x)N/In_(y)Ga_(1-y)N (0.05≦x≦1.0, 0≦y≦1.0, x>y).
 17. Asemiconductor light-emitting device of claim 12, wherein the activelayer has a barrier layer provided being in adjacent to the layer.
 18. Asemiconductor light-emitting device of claim 17, wherein an impurityconcentration of the overflow prevention layer is 5×10¹⁸/cm⁻³ or more,and the layer is a non-doped layer.
 19. A semiconductor light-emittingdevice of claim 12, wherein the active layer has a multiple quantum wellstructure formed of In_(x)Ga_(1-x)N/In_(y)Ga_(1-y)N (0.05≦x≦1.0,0≦y≦1.0, x>y).
 20. A semiconductor light-emitting device of claim 18,wherein the active layer has a multiple quantum well structure formed ofIn_(x)Ga_(1-x)-N/In_(y)Ga_(1-y)N (0.05≦x≦1.0, 0≦y≦1.0, x>y).